Ultraviolet and visible Raman spectroscopic investigations of nanocrystalline carbon thin films grown by bias-assisted hot-filament chemical vapor deposition

Journal of Raman Spectroscopy

Volumn 34, Issue 3, 2003, Pages 192-198

  Gupta, S ^a,c   Weiner, B R ^a   Nelson, W H ^b   Morell, G ^a  

^a UNIVERSITY OF PUERTO RICO   (Puerto Rico)

^b UNIVERSITY OF RHODE ISLAND   (United States)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Nanocrystalline carbon; sp3 bonded carbon; Thin films; uv Raman spectroscopy

Indexed keywords

AMORPHOUS CARBON; CARBON FILMS; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; DISPERSIONS; ION BEAM ASSISTED DEPOSITION; ION BEAMS; MICROSTRUCTURE; NANOCRYSTALS; POSITIVE IONS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SUBSTRATES;

BIASING CONDITIONS; CARBON MATERIAL; CARBON THIN FILMS; HOT FILAMENTS CHEMICAL VAPOR DEPOSITIONS; NANOCRYSTALLINE CARBON; SP3-BONDED CARBON; SUBSTRATE BIASING; THIN-FILMS; ULTRAVIOLET RAMAN SPECTROSCOPY; VISIBLE AND ULTRAVIOLET;

THIN FILMS;

CARBON; HYDROGEN; METHANE; MOLYBDENUM;

ARTICLE; CHEMICAL BINDING; CRYSTAL STRUCTURE; HOT FILAMENT CHEMICAL VAPOR DEPOSITION; INTERMETHOD COMPARISON; ION BEAM ASSISTED DEPOSITION; ION TRANSPORT; QUALITATIVE ANALYSIS; QUALITATIVE DIAGNOSIS; RAMAN SPECTROMETRY; RELIABILITY; STRUCTURE ANALYSIS; ULTRAVIOLET SPECTROSCOPY; VAPORIZATION;

EID: 0037347691     PISSN: 03770486     EISSN: None     Source Type: Journal    
DOI: 10.1002/jrs.974     Document Type: Article

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