A golden-block-based self-refining scheme for repetitive patterned wafer inspections

Machine Vision and Applications

Volumn 13, Issue 5-6, 2003, Pages 314-321

  Guan, Sheng Uei ^a   Xie, Pin ^a   Li, Hong ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Golden block; Golden template; Image to image reference method; PDI; Wafer inspection

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; DATABASE SYSTEMS; IMAGE ANALYSIS; INSPECTION;

WAFER IMAGES;

IMAGING TECHNIQUES;

EID: 0037344957     PISSN: 09328092     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00138-002-0086-x     Document Type: Article

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