Machine vision algorithms for semiconductor wafer inspection: A project with Inspex

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3521, Issue , 1998, Pages 221-228

  Chen, Chi Hau ^a   Cheng, Tzu Hung ^a   Wu, Wo Tak ^a   Driscoll, Shawn A ^a  

^a University of Massachusetts Dartmouth   (United States)

Author keywords

Algorithms for wafer inspection; Defect extraction; Feature extraction; Light intensity alignment; Machine vision; Segmentation; Wavelet based approach

Indexed keywords

ALGORITHMS; DEFECTS; FEATURE EXTRACTION; IMAGE ANALYSIS; IMAGE SEGMENTATION; INSPECTION; SEMICONDUCTOR DEVICE MANUFACTURE;

SEMICONDUCTOR WAFER INSPECTION;

COMPUTER VISION;

EID: 0032224531     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.326963     Document Type: Conference Paper

References (12)

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