High-speed detection of pattern defects using laser scattering

Solid State Technology

Volumn 38, Issue 11, 1995, Pages

  Howland, Rebecca S ^a   Wells, Keith B ^a   Trafas, Brian M ^a  

^a KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL IMPURITIES; IMAGING TECHNIQUES; INSPECTION; LASER APPLICATIONS; LIGHT SCATTERING; SIGNAL FILTERING AND PREDICTION;

LASER SCATTERING; PATTERN DEFECTS;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0029406707     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (5)