Numerical computation on the generation of CH3 and H radicals by the thermal plasma decomposition of hydrocarbons

Journal of the Korean Physical Society

Volumn 42, Issue SUPPL.2, 2003, Pages

  Kim, Keun Su ^a   Hwang, Tae Hyung ^a   Choi, Su Seok ^a   Hong, Sang Hee ^a   Shin, Homin ^b  

^a Seoul National University   (South Korea)

^b NONE

Author keywords

dc arc jet diamond CVD; Numerical modeling; Radicals generation; Thermal plasma decomposition; Two dimensional

Indexed keywords

EID: 0037309271     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (14)

1. D. G. Goodwin, Appl. Phys. Lett. 59, 277 (1991).
2. D. F. Bahr, D. V. Bucci, L. S. Schadler, J. A. Last, J. Heberlein, E. Pfender and W. W. Gerberich, Diamond and Related Materials 5, 1462 (1996).
3. S. W. Reeve, W. A. Weimer and D. S. Dandy, J. Mater. Res. 11, 694 (1996).
4. M. Frenklach, J. Appl. Phys. 65, 5142 (1989).
5. M. I. Boulos, IEEE Trans. Plasma Sci. 19, 1078 (1991).
6. P. Fauchais and A. Vardelle, IEEE Trans. Plasma Sci. 25, 1258 (1997).
7. J. H. Park and S. H. Hong, J. Korean Phys. Soc. 31, 753 (1997)
8. S. V. Patankar, Numerical Heat Transfer and Fluid Flow (Hemisphere, New York, 1980).
9. R. J. Kee, F. M. Rupley, E. Meeks and J. A. Miller, Sandia National Laboratories Report SAND96-8216 (1996).
10. S. J. Harris, J. Appl. Phys. 65, 3044 (1989).
11. D. B. Olson and W. C. Gardiner, Combust. Flame 32, 151 (1978).
12. W. C. Gardiner, Combustion Chemistry (Springer, New York, 1984).
13. P. Glarborg, J. A. Miller and R. J. Kee, Combust. Flame 65, 177 (1986).
14. W. J. Pitz and C. K. Westbrook, Combust. Flame 63, 113 (1986).