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Volumn 11, Issue 3, 1996, Pages 694-702
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On the optimization of a dc arcjet diamond chemical vapor deposition reactor
a,c a b |
Author keywords
[No Author keywords available]
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Indexed keywords
CALCULATIONS;
DEPOSITION;
FILM GROWTH;
FILM PREPARATION;
METHANE;
PLASMA APPLICATIONS;
PLASMA JETS;
REACTION KINETICS;
SYNTHESIS (CHEMICAL);
SYNTHETIC DIAMONDS;
DC ARCJET DEPOSITION REACTOR;
DIAMOND FILMS;
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EID: 0030109421
PISSN: 08842914
EISSN: None
Source Type: Journal
DOI: 10.1557/JMR.1996.0084 Document Type: Article |
Times cited : (4)
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References (33)
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