Real-time photolithographic technique for fabrication of arbitrarily shaped microstructures

Optical Engineering

Volumn 42, Issue 2, 2003, Pages 477-481

  Peng, Qinjun ^a   Liu, Shijie ^a   Guo, Yongkang ^a   Chen, Bo ^a   Du, Jinglei ^a   Zeng, Yangsu ^a   Zhou, Chongxi ^b   Cui, Zheng ^c  

^a SICHUAN UNIVERSITY   (China)

^b INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^c RUTHERFORD APPLETON LABORATORY   (United Kingdom)

Author keywords

Arbitrarily shaped microstructure; Liquid crystal display; Real time mask; Real time photolithography

Indexed keywords

LIQUID CRYSTAL DISPLAYS; MASKS; MICROSTRUCTURE; OPTICAL DESIGN;

REAL-TIME MASKS;

PHOTOLITHOGRAPHY;

EID: 0037301817     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1531976     Document Type: Article

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