A simplified microfabrication technology for production of glass microfluidic chips

Fenxi Huaxue

Volumn 31, Issue 1, 2003, Pages 116-119

  Yin, Xuefeng ^a   Shen, Hong ^a   Fang, Zhaolun ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Chip bonding; Microfabrication; Microfluidic chips; Photolithography; Wet etching

Indexed keywords

GLASS; WATER;

ARTICLE; FILM; LABORATORY; LASER; PHOTOGRAPHY; POLYMERASE CHAIN REACTION; TECHNOLOGY;

EID: 0037285868     PISSN: 02533820     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

1. Fang Zhaolun. University Chemistry, 2001, 16:1-6
2. McCreedy T. Tends Anal. Chem., 2000, 19:396-401
3. Manz A, Becker H. (Eds) Microsystem Technology in Chemistry and Life Science, Springer, Berlin, 1999:12-13
4. Duffy D C, McDonald J C, Sehneller O J A, Whitesides G M. Anal. Chem., 1998, 70:4974-4984
5. Simpson P C, Woolley A T, Mathies R A. J. Biomed. Microdev., 1998, 1:7-26
6. Stjerstroem M, Roeraade J. J. Micromech. Microeng., 1998, 8:33-38
7. Fang Q, Xu G M, Fang Z L. Anal. Chem., 2002, 74:1223-1231
8. Liu Jinhua, Yin Xuefeng, Xu Guangming, Fang Zhaolun, Chen Huaizeng. Chemical Journal of Chinese Universities, accepted
9. Yin Xuefeng, Fang Qun, Ling Yunyang. Modern Scientific Instruments, 2001, 78 (4):10-14
10. Tang Yanghua, Ye Xiongying, Zhou Zhaoying, Jin Ya, Feng Yanying. Chinese J. Anal. Chem., 2001, 29:606-610
11. Kopp M U, Demello A J, Manz A. Science, 1998, 280:1046-1048
12. Neudeck G W, Pierret R F. (Eds) Introduction to Microelectronic Fabrication, (Modular Series on Solid State Devices, V.5), Addison-Wesley Publishing Company, Massachusetts, 1993