Spatial Transition of the Electron Gas from the Active to the Remote Plasma State

Plasma Chemistry and Plasma Processing

Volumn 23, Issue 3, 2003, Pages 415-437

  Loffhagen, D ^a   Sigeneger, F ^a   Winkler, R ^a  

^a Inst Niedertemperatur Plasmaphys   (Germany)

Author keywords

Diffusion driven flux; Energy dissipation; Field driven flux; Monte Carlo simulation; Power balance; Remote plasma; Space dependent Boltzmann equation; Spatially decaying plasma; Transport properties; Velocity distribution function

Indexed keywords

ANISOTROPY; CARRIER CONCENTRATION; CHEMICAL ACTIVATION; DIFFUSION; ELECTRON GAS; ENERGY DISSIPATION; FUNCTIONS; KINETIC THEORY; MONTE CARLO METHODS; TRANSPORT PROPERTIES; VELOCITY MEASUREMENT;

FIELD-DRIVEN FLUX; POWER BALANCE; REMOTE PLASMA; SPATIALLY DECAYING PLASMA;

PLASMAS;

EID: 0037266202     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1023231030637     Document Type: Article

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