SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 1 SPEC., 2003, Pages 627-630

Silicon doped diamond-like carbon films as a coating for improvement of electron field emission

(8) Evtukh, Anatoli A a Litovchenko, Volodimir G a Litvin, Yurii M a Fedin, Dmitrii V a Dzyan, Olexander S a Pedchenko, Yu N a Chakhovskoi, Andrei G b Felter, Thomas E c

a INSTITUTE OF SEMICONDUCTOR PHYSICS (Ukraine)

b UNIVERSITY OF CALIFORNIA (United States)

c LAWRENCE LIVERMORE NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; COATINGS; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRON EMISSION; ELECTRON TRANSPORT PROPERTIES; MIS DEVICES; MIXTURES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SUBSTRATES;

ELECTRON CONDUCTIVITY; ELECTRON FIELD EMISSION; METAL-INSULATOR-SEMICONDUCTOR CAPACITORS; SILICON DOPED DIAMOND-LIKE CARBON FILMS; SILICON TIPS;

DIAMOND LIKE CARBON FILMS;

EID: 0037207783 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1528918 Document Type: Article

Times cited : (5)

References (10)

1
- 5544281479
- (abstract)
- A. A. Evtukh, V. G. Litovchenko, R. I. Marchenko, and B. N. Romanuyk, MRS 1995 Spring Meeting, 1995 (abstract) p. 396.
- MRS 1995 Spring Meeting, 1995 , pp. 396
- Evtukh, A.A.¹ Litovchenko, V.G.² Marchenko, R.I.³ Romanuyk, B.N.⁴

2
- 85069014014
- D. Hong and M. Aslam, Proceedings of the 7th IVMC, 1994, p. 96.
- Proceedings of the 7th IVMC, 1994 , pp. 96
- Hong, D.¹ Aslam, M.²

3
- 0030364965
- S. Lee, Su. Lee, S. Lee, and D. Jeon, Proceedings of the 9th IVMC, 1996, p. 283.
- Proceedings of the 9th IVMC, 1996 , pp. 283
- Lee, S.¹ Lee, Su.² Lee, S.³ Jeon, D.⁴

4
- 36449009025
- G. A. J. Amaratunga and S. R. P. Silva, Appl. Phys. Lett. 68, 2529 (1996).
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2529
- Amaratunga, G.A.J.¹ Silva, S.R.P.²

5
- 0031550402
- O. Groning, O. M. Kuttel, P. Groning, and L. Schlapbach, Appl. Surf. Sci. 111, 135 (1997).
- (1997) Appl. Surf. Sci. , vol.111 , pp. 135
- Groning, O.¹ Kuttel, O.M.² Groning, P.³ Schlapbach, L.⁴

6
- 0031550388
- V. G. Litovchenko, A. A. Evtukh, R. I. Marchenko, N. L. Klyui, and V. A. Semenovich, Appl. Surf. Sci. 111, 213 (1997).
- (1997) Appl. Surf. Sci. , vol.111 , pp. 213
- Litovchenko, V.G.¹ Evtukh, A.A.² Marchenko, R.I.³ Klyui, N.L.⁴ Semenovich, V.A.⁵

7
- 0031102716
- V. G. Litovchenko, A. A. Evtukh, R. I. Marchenko, N. I. Klyui, and V. A. Semenovich, J. Micromech. Microeng. 7, 1 (1997).
- (1997) J. Micromech. Microeng. , vol.7 , pp. 1
- Litovchenko, V.G.¹ Evtukh, A.A.² Marchenko, R.I.³ Klyui, N.I.⁴ Semenovich, V.A.⁵

8
- 22644452191
- A. A. Evtukh, V. G. Litovchenko, N. I. Klyui, R. I. Marchenko, and S. Yu. Kudzinovski, J. Vac. Sci. Technol. B 1, 679 (1999).
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 679
- Evtukh, A.A.¹ Litovchenko, V.G.² Klyui, N.I.³ Marchenko, R.I.⁴ Kudzinovski, S.Yu.⁵

9
- 0026238249
- D. W. Branston and D. Stephany, IEEE Trans. Electron Devices ED-38, 2329 (1991).
- (1991) IEEE Trans. Electron Devices , vol.ED-38 , pp. 2329
- Branston, D.W.¹ Stephany, D.²

10
- 0001986822
- I. Brodie and C. A. Spindt, Adv. Electron. Electron Phys. 83, 1 (1996).
- (1996) Adv. Electron. Electron Phys. , vol.83 , pp. 1
- Brodie, I.¹ Spindt, C.A.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.