Enhancement of field emission from cathodes with superthin diamond-like carbon films

Applied Surface Science

Volumn 111, Issue , 1997, Pages 213-217

  Litovchenko, V G ^a   Evtukh, A A ^a   Marchenko, R I ^a   Klyui, N I ^a   Semenovich, V A ^b  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

^b BAKUL INSTITUTE FOR SUPERHARD MATERIALS   (Ukraine)

Author keywords

Diamond like carbon film; Field emission

Indexed keywords

CARBON; DIAMOND FILMS; ELECTRIC FIELD EFFECTS; ELECTRON EMISSION; ETCHING; ION IMPLANTATION; SEMICONDUCTING SILICON; THIN FILMS;

DIAMOND LIKE CARBON (DLC) FILMS; SILICON TIPS;

FIELD EMISSION CATHODES;

EID: 0031550388     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00727-1     Document Type: Article

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