Dielectric properties of molybdenum-containing diamond-like carbon films deposited using electron cyclotron resonance chemical vapor deposition

Thin Solid Films

Volumn 409, Issue 2, 2002, Pages 211-219

  Huang, Q F ^a   Yoon, S F ^a   Rusli, ^a   Zhang, Q ^a   Ahn, J ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Carbon; Dielectric properties; Molybdenum; Permittivity

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRON CYCLOTRON RESONANCE; FREQUENCIES; LOW TEMPERATURE EFFECTS; MOLYBDENUM; PERMITTIVITY; POLARIZATION; SATURATION (MATERIALS COMPOSITION);

RELAXATION POLARIZATION;

DIAMOND LIKE CARBON FILMS;

EID: 0037197375     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00049-4     Document Type: Article

References (24)