Accurate analytic expressions for frequency-dependent inductance and resistance of single on-chip interconnects on conductive silicon substrate

Physics Letters, Section A: General, Atomic and Solid State Physics

Volumn 293, Issue 3-4, 2002, Pages 195-198

  Ymeri, Hasan ^a   Nauwelaers, Bart ^a   Maex, Karen ^a,b   De Roest, David ^b   Vandenberghe, Servaas ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b IMEC   (Belgium)

Author keywords

Inductance; Interconnects; On chip interconnects; Resistance; Silicon substrate; Skin effect

Indexed keywords

COMPUTER AIDED DESIGN; ELECTRIC RESISTANCE; EQUIVALENT CIRCUITS; INDUCTANCE; OPTICAL INTERCONNECTS; SILICON; SKIN EFFECT; SUBSTRATES;

ANALYTIC EXPRESSIONS; CLOSED-FORM EXPRESSION; DISTRIBUTED INDUCTANCE; EQUIVALENT CIRCUIT MODEL; FREQUENCY DEPENDENT INDUCTANCE; ON-CHIP INTERCONNECTS; SILICON SUBSTRATES; VECTOR MAGNETIC POTENTIAL;

INTEGRATED CIRCUIT INTERCONNECTS;

SILICON;

ACCURACY; ANALYTIC METHOD; ARTICLE; ELECTRIC CONDUCTIVITY; ELECTROMAGNETIC FIELD; FREQUENCY ANALYSIS; SEMICONDUCTOR; SIGNAL PROCESSING;

EID: 0037185458     PISSN: 03759601     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0375-9601(01)00820-9     Document Type: Article

References (11)