A study on the chemical mechanical micro-machining (C3M) process and its application

Journal of Materials Processing Technology

Volumn 130-131, Issue , 2002, Pages 390-395

  Park, J M ^a   Jeong, S C ^a   Lee, H W ^a   Jeong, H D ^a   Lee, Eung Suk ^b  

^a Pusan National University   (South Korea)

^b Korea Institute of Machine and Materials   (South Korea)

Author keywords

Al alloy; Chemical and mechanical characteristics; Chemical mechanical micro machining; Chemically reacted layer; Micro mechanical tool; SEM; Si wafer; XPS

Indexed keywords

BRITTLENESS; BUCKLING; DUCTILITY; ELASTICITY; FRACTURE; FRICTION; LOADS (FORCES); MACHINE TOOLS; PLASTIC DEFORMATION; SCANNING ELECTRON MICROSCOPY; WEAR OF MATERIALS; X RAY PHOTOELECTRON SPECTROSCOPY; YIELD STRESS;

CHEMICAL MECHANICAL MICRO-MACHINING;

MICROMACHINING;

EID: 0037147027     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-0136(02)00732-X     Document Type: Conference Paper

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