|
Volumn 16, Issue 6-7, 2002, Pages 830-835
|
Effect of focussed vacuum arc plasma deposition on the properties of tetrahedral amorphous carbon films
a a a a a |
Author keywords
[No Author keywords available]
|
Indexed keywords
CARBON;
CHEMICAL BINDING;
CONFERENCE PAPER;
DENSITY;
EQUIPMENT DESIGN;
FILM;
MAGNETIC FIELD;
MATERIAL STATE;
OPTICS;
PLASMA;
POLARIMETRY;
STRESS;
ULTRAVIOLET SPECTROSCOPY;
VACUUM;
|
EID: 0037139077
PISSN: 02179792
EISSN: None
Source Type: Journal
DOI: 10.1142/s0217979202010464 Document Type: Conference Paper |
Times cited : (1)
|
References (11)
|