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Volumn 66, Issue 3-4, 2002, Pages 373-378

Crystallinity and stoichiometry of InNx films deposited by reactive dc magnetron sputtering

(4) Song, P K a Sato, D a Kon, M a Shigesato, Y a

a AOYAMA GAKUIN UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; MAGNETRON SPUTTERING; METALLIC FILMS; POLYCRYSTALLINE MATERIALS; STOICHIOMETRY; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

SODA-LIME GLASSES;

INDIUM COMPOUNDS;

EID: 0037136213 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/S0042-207X(02)00157-4 Document Type: Article

Times cited : (9)

References (13)

1
- 0027640420
- (1993) J Appl Phys , vol.74 , pp. 1818
- Gelmont, B.¹ Kim, K.² Shur, M.³

2
- 0000815007
- (1992) J Vac Sci Technol , vol.B10 , pp. 1237
- Strite, S.¹ Morkoc, H.²

3
- 0032476346
- (1998) Thin Solid Films , vol.332 , pp. 267
- Asai, N.¹ Inoue, Y.² Sugimura, H.³ Takai, O.⁴

4
- 4243857971
- Rossnagel S.M., Cuomo J.J., Westwood W.D., editors. New Jersey: Noyes Publications (Chapter 9)
- (1990) Handbook of plasma processing technology
- Westwood, W.D.¹

5
- 0003392447
- New York: Wiley (Chapter 9)
- (1974) X-ray diffraction procedures for polycrystalline and amorphous material, 2nd ed
- Klug, H.P.¹ Alexander, L.E.²

6
- 0019024636
- (1980) Thin Solid Films , vol.69 , pp. 229
- Eltoukhy, A.H.¹ Natarajan, B.R.² Green, J.E.³

7
- 0030123685
- (1996) Jpn J Appl Phys , vol.35 , pp. 2261
- Kumar, S.¹ Mo, L.² Motlan³ Tansley, T.L.⁴

8
- 0024641687
- (1989) Thin Solid Films , vol.171 , pp. 5
- Thornton, J.A.¹ Hoffman, D.W.²

9
- 0019612734
- (1981) J Appl Phys , vol.52 , pp. 5803
- Meyer, K.¹ Schuller, I.K.² Falco, C.M.³

10
- 0021373616
- (1984) Thin Solid Films , vol.112 , pp. 161
- Motohiro, T.¹ Taga, Y.²

11
- 0032046806
- (1998) Jpn J Appl Phys , vol.37 , pp. 1870
- Song, P.K.¹ Shigesato, Y.² Yasui, I.³ Ow-Yang, C.W.⁴ Paine, D.C.⁵

12
- 0019022406
- (1980) Thin Solid Films , vol.69 , pp. 201
- Natarajan, B.R.¹ Eltoukhy, A.H.² Green, J.E.³

13
- 0029277497
- (1995) J Vac Sci Technol , vol.A13 , pp. 268
- Shigesato, Y.¹ Yasui, I.² Hayashi, Y.³ Takaki, S.⁴ Oyama, T.⁵ Kamei, M.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.