Ion and neutral temperatures in an electron cyclotron resonance plasma

Thin Solid Films

Volumn 390, Issue 1-2, 2001, Pages 208-211

  Yonesu, Akira ^a   Shinohara, Shunjiro ^b   Yamashiro, Yasumasa ^a   Kawai, Yoshinobu ^b  

^a UNIVERSITY OF THE RYUKYUS   (Japan)

^b KYUSHU UNIVERSITY   (Japan)

Author keywords

ECR plasma; Ion temperature; Neutral temperature; Optical emission spectroscopy; Potential fluctuation

Indexed keywords

EMISSION SPECTROSCOPY; IONS; NEUTRONS; PLASMAS; TEMPERATURE MEASUREMENT;

ELECTRON CYCLOTRON RESONANCE PLASMA;

ELECTRON CYCLOTRON RESONANCE;

EID: 0035973391     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)00921-X     Document Type: Article

References (9)