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Volumn 41, Issue 6 B, 2002, Pages
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Fast micro-photodetector for shorter wavelengths on silicon-on-insulator structures
a
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Author keywords
Blue light; High speed; MSM; Photodetector; Samarium; Silicon on insulator
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Indexed keywords
AMORPHOUS SILICON;
CHEMICAL VAPOR DEPOSITION;
CURRENT VOLTAGE CHARACTERISTICS;
ELECTRON BEAM LITHOGRAPHY;
LIGHT ABSORPTION;
MOS DEVICES;
OHMIC CONTACTS;
SAMARIUM;
SCHOTTKY BARRIER DIODES;
SEMICONDUCTING SILICON;
SIGNAL TO NOISE RATIO;
SILICON ON INSULATOR TECHNOLOGY;
FULL WIDTH AT HALF MAXIMUM;
SCHOTTKY CONTACTS;
PHOTODETECTORS;
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EID: 0037098559
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.41.l703 Document Type: Letter |
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Times cited : (2)
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References (15)
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