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Journal of Applied Physics

Volumn 91, Issue 12, 2002, Pages 10022-10027

Evaluation of the (Ba,Sr)RuO 3 and (Ba,Sr)RuO 3/Ru bilayer as an oxygen diffusion barrier

(4) Park, Jeong Hee a Hong, Duck Hwa a Kim, Young Bae a Choi, Duck Kyun a

a Hanyang University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BI-LAYER; BLOCKING EFFECT; LOW DIELECTRIC; OXIDE ELECTRODES; OXYGEN AMBIENT; OXYGEN ATOM; OXYGEN DIFFUSION; OXYGEN DIFFUSION BARRIERS; SEQUENTIAL DEPOSITION; TIN LAYERS; TIO;

CRYSTALLINE MATERIALS; DIELECTRIC FILMS; DIFFUSION BARRIERS; DIFFUSION IN GASES; ELECTRIC PROPERTIES; OXYGEN; RUTHENIUM ALLOYS; RUTHENIUM COMPOUNDS; TITANIUM DIOXIDE; TITANIUM NITRIDE;

BARIUM;

EID: 0037098071 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1480114 Document Type: Article

Times cited : (7)

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