Measurement of surface features beyond the diffraction limit with an imaging ellipsometer

Optics Letters

Volumn 27, Issue 10, 2002, Pages 821-823

  Zhan, Qiwen ^a   Leger, James R ^a  

^a University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COHERENT LIGHT; COMPUTER SIMULATION; ELECTROMAGNETIC WAVE DIFFRACTION; ELLIPSOMETRY; LIGHT POLARIZATION; OPTICAL RESOLVING POWER; SURFACE MEASUREMENT; TOPOLOGY; VECTORS;

IMAGING ELLIPSOMETERS; POLARIZATION SIGNATURES;

IMAGING SYSTEMS;

EID: 0037094331     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.27.000821     Document Type: Article

References (5)