![]() |
Volumn 74, Issue 10, 2002, Pages 2361-2369
|
Quantitative depth profile analysis of micrometer-thick multilayered thin coatings using step-scan FT-IR photoacoustic spectroscopy
|
Author keywords
[No Author keywords available]
|
Indexed keywords
DEPTH PROFILE ANALYSIS;
THIN COATINGS;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
MICROMETERS;
MICROSCOPIC EXAMINATION;
PHOTOACOUSTIC SPECTROSCOPY;
MULTILAYERS;
ANALYTIC METHOD;
ARTICLE;
COMPARATIVE STUDY;
INFRARED SPECTROSCOPY;
MEASUREMENT;
MICROSCOPY;
MICROTOMY;
PHOTOACOUSTIC SPECTROSCOPY;
THICKNESS;
|
EID: 0037092998
PISSN: 00032700
EISSN: None
Source Type: Journal
DOI: 10.1021/ac011027j Document Type: Article |
Times cited : (17)
|
References (23)
|