Phase-resolved depth profiling of thin-layered plasma polymer films by step-scan Fourier transform infrared photoacoustic spectroscopy

Applied Spectroscopy

Volumn 51, Issue 8, 1997, Pages 1238-1244

  Jiang, Eric Y ^a,c   Palmer, Richard A ^a   Barr, Nancy E ^b   Morosoff, Nicholas ^b  

^a DUKE UNIVERSITY   (United States)

^b MISSOURI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (United States)

^c BIO RAD LABORATORIES   (United States)

Author keywords

Depth profiling; Phase resolved spectroscopy; Photoacoustic spectroscopy (PAS); Plasma polymers; Step scan FT IR

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; PHOTOACOUSTIC SPECTROSCOPY; PLASMAS; THIN FILMS;

PHASE RESOLVED DEPTH PROFILING; PLASMA POLYMERS; STEP SCAN FOURIER TRANSFORM INFRARED SPECTROSCOPY;

PLASTIC FILMS;

EID: 0031206769     PISSN: 00037028     EISSN: None     Source Type: Journal    
DOI: 10.1366/0003702971941818     Document Type: Article

References (29)

1. D. G. Mead, S. R. Lowery, D. W. Vidrine, and D. R. Mattson, Proc. 4th Int. Conf. Infrared Millimeter Waves (1979), p. 231.
2. M. G. Rockley, Chem. Phys. Lett. 68, 455 (1979).
3. L. B. Lloyd, S. M. Riseman, R. K. Burnham, E. M. Eyring, and M. M. Farrow, Rev. Sci. Instrum. 51, 1488 (1980).
4. D. Débarre, A. C. Boccara, and D. Fournier, Appl. Opt. 20, 4281 (1981).
5. R. M. Dittmar. J. L. Chao, and R. A. Palmer, Appl. Spectrosc. 45, 1104 (1991).
6. C. J. Manning and P. R. Griffiths, Appl. Spectrosc. 47, 1345 (1993).
7. D. L. Drapcho, R. Curbelo, E. Y. Jiang, R. A. Crocombe, and W. J. McCarthy, Appl. Spectrosc, 51, 453 (1997).
8. E. Y. Jiang, J. R. Powell, R. Curbelo, L. L. Barber, R. A. Crocombe, and D. L. Drapcho, Abstracts of the Pittsburgh Conference on Analytical and Applied Spectroscopy, Chicago, Illinois (1996), Paper #430.
9. C. J. Manning, R. M. Dittmar, J. L. Chao, and R. A. Palmer, Infrared Phys. 33, 53 (1992).
10. C. J. Manning, J. M. Widder, and R. A. Palmer, SPIE Proc. 1145, 575 (1989).
11. K. H. Michaelian, Appl. Spectrosc. 43, 185 (1989).
12. K. H. Michaelian, Appl. Spectrosc. 45, 302 (1991).
13. R. M. Dittmar, Ph.D. Dissertation, Duke University, Durham, North Carolina (1992).
14. R. A. Palmer and R. M. Dittmar, Thin Solid Films, Section A 223, 31 (1993).
15. J. F. McClelland, R. W. Jones, S. Luo, and L. M. Seaverson, "A Practical Guide to FTIR Photoacoustic Spectroscopy", in Practical Sampling Techniques of Infrared Analysis, P. Coleman, Ed. (CRC Press, Boca Raton, Florida, 1993).
16. B. Mongeau, G. Rousset, and L. Bertrand, Can. J. Phys. 64, 1056 (1986).
17. R. M. Dittmar, R. A. Palmer, and R. O. Carter III, Appl. Spectrosc. Rev. 29, 171 (1994).
18. J. F. McClelland, R. W. Jones, and S. Luo, Abstracts of 1993 Pittsburgh Conference on Analytical Chemistry and Applied Spectroscopy, Atlanta, Georgia (1993) Paper #181.
19. R. A. Palmer, E. Y. Jiang, and J. L. Chao, SPIE Proc. 2089, 250 (1993).
20. E. Y. Jiang, R. A. Palmer, and J. L. Chao, Abstracts of the Pittsburgh Conference on Analytical and Applied Spectroscopy, Chicago, Illinois (1994) Paper #512.
21. R. A. Palmer and E. Y. Jiang, J. de Physique, IV, Colloque C7, Supplément au Journal de Physique III, Vol. 4, C7-337, Juilet (1994).
22. E. Y. Jiang, R. A. Palmer, L. M. Connors, and J. L. Chao, Abstracts of the Pittsburgh Conference on Analytical and Applied Spectroscopy, New Orleans, Louisiana (1995) Paper #1044.
23. E. Y. Jiang, R. A. Palmer, and J. L. Chao, J. Appl. Phys. 78, 460 (1995).
24. G. M. Story, C. Marcott, and I. Noda, SPIE Proc. 2089 (1993).
25. C. Marcott, G. M. Story, and I. Noda, Abstracts of the Pittsburgh Conference on Analytical and Applied Spectroscopy, New Orleans, Louisiana (1995), Paper #1043.
26. A. M. Wróbel and M. R. Wertheimer, in Plasma Deposition, Treatment, and Etching of Polymers, R. d'Agostino, Ed. (Academic Press, New York, 1990), Chap. 3, p. 220.
27. A. Rosencwaig and A. Gersho, J. Appl. Phys. 47, 64 (1976).
28. Y. S. Touloukian, R. W. Powell, C. Y. Ho, and M. C. Nicolaou, Thermal Diffusivity, (IFI/Plenum, New York, 1973), Vol. 10, p. 593-619.
29. Handbook of Chemistry and Physics (CRC Press, Boca Raton, Florida, 1993-1994).