Studies on thermal properties of a micro gas sensing element array with central single heater

Sensors and Actuators, B: Chemical

Volumn 83, Issue 1-3, 2002, Pages 281-284

  Chung, Wan Young ^a   Lim, Jun Woo ^b   Lee, Duk Dong ^b  

^a Dongseo University   (South Korea)

^b Kyungpook National University   (South Korea)

Author keywords

Gas sensor; Micro gas sensor; Sensor array; Silicon sensor; Thermal simulation

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; SILICON SENSORS; THERMODYNAMIC PROPERTIES;

MICRO GAS SENSORS;

CHEMICAL SENSORS;

EID: 0037086016     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)01071-1     Document Type: Conference Paper

References (7)

1. Chemometric analysis of multi-sensor arrays
2. Domestic gas detection system using two integrated sensors
3. Smart chemical sensing arrays using tin oxide sensors and analog winner-take all signal processing
4. Monolithic thin-film metal-oxide gas-sensor arrays with application to monitoring of organic vapors
5. Selected-area deposition of multiple active films for conductometric micro-sensor arrays
6. Thermal and gas-sensing properties of planar-type micro gas sensor