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Volumn 41, Issue 2 B, 2002, Pages
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Effect of milling depth of the junction pattern on magnetic properties and yields in magnetic tunnel junctions
a
a
NEC CORPORATION
(Japan)
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Author keywords
Junction milling depth; Just etched junction; Magnetostatic coupling; Milling redeposit; MTJ; Over etched junction
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Indexed keywords
DEMAGNETIZATION;
ELECTRIC POTENTIAL;
MAGNETIC COUPLINGS;
MAGNETIC FIELDS;
MAGNETORESISTANCE;
MAGNETOSTATICS;
SCANNING ELECTRON MICROSCOPY;
SECONDARY ION MASS SPECTROMETRY;
MAGNETIC TUNNEL JUNCTIONS (MTJ);
MAGNETOSTATIC COUPLINGS;
TUNNEL JUNCTIONS;
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EID: 0037085214
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/JJAP.41.L183 Document Type: Article |
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Times cited : (10)
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References (9)
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