Density functional theory study of atomic nitrogen on the Si(100)-(2 × 1) surface

Journal of Physical Chemistry B

Volumn 106, Issue 10, 2002, Pages 2643-2648

  Widjaja, Yuniarto ^a   Heyman, Annica ^a,c   Musgrave, Charles B ^b  

^a Stanford University   (United States)

^b STANFORD UNIVERSITY   (United States)

^c LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

PRECURSORS;

ADSORPTION; CHEMICAL BONDS; FILM GROWTH; NITROGEN; PROBABILITY DENSITY FUNCTION; SEMICONDUCTING SILICON; SURFACE REACTIONS;

REACTION KINETICS;

EID: 0037076120     PISSN: 10895647     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp013335r     Document Type: Article

References (36)

1. Hashimoto, A.; Kobayashi, M.; Kamijoh, T.; Takano, H.; Sakuta, M. J. Electrochem. Soc. 1986, 133, 1464.
2. Kooi, E.; Vanlierop, J.G.; Appels, J.A. J. Electrochem. Soc. 1976, 123, 1117.
3. Silicon Nitride in Electronics; Belyi, V.I., et al., Ed.; Elsevier: New York, 1988; Vol. 34.
4. Osenbach, J.W. J. Appl. Phys. 1988, 63, 4494.
5. Ma, Y.; Yasuda, T.; Lucovsky, G. J. Vac. Sci. Technol. B 1993, 11, 1533.
6. Schrott, A.G.; Su, Q.X.; Fain, S.C. Surf. Sci. 1982, 123, 223.
7. Schrott, A.G.; Fain, S.C. Surf. Sci. 1981, 111, 39.
8. Larsson, C.U.S.; Andersson, C.B.M.; Prince, N.P.; Flodstrom, A.S. Surf. Sci. 1992, 271, 349.
9. Peden, C.H.F.; Rogers, J.W.; Shinn, N.D.; Kidd, K.B.; Tsang, K.L. Phys. Rev. B 1993, 47, 15622.
10. Taylor, P.A.; Wallace, R.M.; Choyke, W.J.; Dresser, M.J.; Yates, J.T. Surf. Sci. 1989, 215, L286.
11. Bater, C.; Sanders, M.; Craig, J.H. Surf. Interface Anal. 2000, 29, 208.
12. Bozso, F.; Avouris, P. Phys. Rev. B 1988, 38, 3937.
13. Widjaja, Y.; Musgrave, C.B. Phys. Rev. B 2001, 64, 205-303.
14. Schrott, A.G.; Fain, S.C. Surf. Sci. 1982, 123, 204.
15. Delord, J.F.; Schrott, A.G.; Fain, S.C. J. Vac. Sci. Technol. 1980, 17, 517.
16. Ueno, L.T.; Ornellas, F.R. Surf. Sci. 2001, 490, L637.
17. Redondo, A.; Goddard, W.A.; Swarts, C.A.; McGill, T.C. J. Vac. Sci. Technol. 1981, 19, 498.
18. Redondo, A.; Goddard, W.A.; McGill, T.C. J. Vac. Sci. Technol. 1982, 21, 649.
19. Redondo, A.; Goddard, W.A.; McGill, T.C. Surf. Sci. 1983, 132, 49.
20. Illas, F.; Roset, L.; Ricart, J.M.; Rubio, J. J. Comput. Chem. 1993, 14, 1534.
21. Pai, S.; Doren, D. J. Phys. Chem. 1994, 98, 4422.
22. Widjaja, Y.; Musgrave, C.B. Surf. Sci. 2000, 469, 9.
23. Becke, A.D. J. Chem. Phys. 1993, 98, 1372.
24. Becke, A.D. Phys. Rev. A 1988, 38, 3098.
25. Lee, C.T.; Yang, W.T.; Parr, R.G. Phys. Rev. B 1988, 37, 785.
26. Pople, J.A.; Head-Gordon, M.; Raghavachari, K. J. Chem. Phys. 1987, 87, 5968.
27. Widjaja, Y.; Mysinger, M.M.; Musgrave, C.B. J. Phys. Chem. B 2000, 104, 2527.
28. Jungnickel, G.; Frauenheim, T.; Jackson, K.A. J. Chem. Phys. 2000, 112, 1295.
29. Frisch, M.J.; Trucks, G.W.; Schlegel, H.B.; Scuseria, G.E.; Robb, M.A.; Cheeseman, J.R.; Zakrzewski, V.G.; Montgomery, J.A., Jr.; Stratmann, R.E.; Burant, J.C.; Dapprich, S.; Millam, J.M.; Daniels, A.D.; Kudin, K.N.; Strain, M.C.; Farkas, O.; Tomasi, J.; Barone, V.; Cossi, M.; Cammi, R.; Mennucci, B.; Pomelli, C.; Adamo, C.; Clifford, S.; Ochterski, J.; Petersson, G.A.; Ayala, P.Y.; Cui, Q.; Morokuma, K.; Malick, D.K.; Rabuck, A.D.; Raghavachari, K.; Foresman, J.B.; Cioslowski, J.; Ortiz, J.V.; Stefanov, B.B.; Liu, G.; Liashenko, A.; Piskorz, P.; Komaromi, I.; Gomperts, R.; Martin, R.L.; Fox, D.J.; Keith, T.; Al-Laham, M.A.; Peng, C.Y.; Nanayakkara, A.; Gonzalez, C.; Challacombe, M.; Gill, P.M.W.; Johnson, B.G.; Chen, W.; Wong, M.W.; Andres, J.L.; Head-Gordon, M.; Replogle, E.S.; Pople, J.A. Gaussian 98, revision A.5; Gaussian, Inc.: Pittsburgh, PA, 1998.
30. Over, H.; Wasserfall, J.; Ranke, W.; Ambiatello, C.; Sawitzki, R.; Wolf, D.; Moritz, W. Phys. Rev. B 1997, 55, 4731.
31. Wolkow, R.A. Phys. Rev. Lett. 1992, 68, 2636.
32. Munz, A.W.; Ziegler, C.; Gopel, W. Phys. Rev. Lett. 1995, 74, 2244.
33. Bullock, E.L.; Gunnella, R.; Patthey, L.; Abukawa, T.; Kono, S.; Natoli, C.R.; Johansson, L.S.O. Phys. Rev. Lett. 1995, 74, 2756.
34. Ramstad, A.; Brocks, G.; Kelly, P.J. Phys. Rev. B 1995, 51, 14504.
35. Landemark, E.; Karlsson, C.J.; Chao, Y.C.; Uhrberg, R.I.G. Phys. Rev. Lett. 1992, 69, 1588.
36. Ueno, L.T.; Ornellas, F.R., personal communication, 2001.