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Electrochimica Acta

Volumn 47, Issue 7, 2002, Pages 1121-1128

Anodic dissolution of silicon monocrystals in anhydrous organic solutions of chlorides

(2) Lelek Borkowska, Urszula a Bana, Jacek a

a AGH UNIVERSITY OF SCIENCE AND TECHNOLOGY (Poland)

Author keywords

Electrochemical dissolution; Etching; Semiconductor

Indexed keywords

ANISOTROPY; DESORPTION; DISSOLUTION; ETCHING; LITHIUM COMPOUNDS; NEGATIVE IONS; ORGANIC SOLVENTS; PASSIVATION; SEMICONDUCTING SILICON; X RAY PHOTOELECTRON SPECTROSCOPY;

ANODIC DISSOLUTION; LINEAR SWEEP VOLTAMMETRY (LSV);

SINGLE CRYSTALS;

EID: 0037059420 PISSN: 00134686 EISSN: None Source Type: Journal
DOI: 10.1016/S0013-4686(01)00834-9 Document Type: Article

Times cited : (8)

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