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Volumn 80, Issue 3, 1996, Pages 251-254
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Blisters in as-deposited films of b.c.c. stainless steel
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Author keywords
Blisters; Residual stress; Scanning electron microscopy; Stainless steel; Thin films
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Indexed keywords
BUCKLING;
DELAMINATION;
ESTIMATION;
ION BEAMS;
MATHEMATICAL MODELS;
MORPHOLOGY;
RESIDUAL STRESSES;
SCANNING ELECTRON MICROSCOPY;
SILICON WAFERS;
SPUTTER DEPOSITION;
STAINLESS STEEL;
STRESS ANALYSIS;
BLISTERS;
ION BEAM SPUTTERING;
RESIDUAL COMPRESSIVE STRESS;
STRESS STATE;
THIN FILMS;
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EID: 0030128153
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/0257-8972(95)02466-2 Document Type: Article |
Times cited : (18)
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References (12)
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