Wide band gap a-SiC:H films for optoelectronic applications

Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 1, 1998, Pages 465-469

  Giorgis, F ^a   Giuliani, F ^a   Pirri, C F ^a   Tresso, E ^a   Conde, J P ^b   Chu, V ^c  

^a POLITECNICO DI TORINO   (Italy)

^b INSTITUTO SUPERIOR TÉCNICO   (Portugal)

^c INESC   (Portugal)

Author keywords

a SiC:H films; ECR CVD; RF CVD

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL DEFECTS; ELECTRON CYCLOTRON RESONANCE; ENERGY GAP; OPTOELECTRONIC DEVICES; SILICON CARBIDE;

RADIO FREQUENCY CHEMICAL VAPOR DEPOSITION (RFCVD);

AMORPHOUS FILMS;

EID: 0032068759     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00090-8     Document Type: Article

References (17)

1. J. Kanicki (Ed.), Amorphous and Microcrystalline Semiconductor Devices, Vol. 1, Artech House, Boston, MA, 1991, references therein.
2. F. Demichelis, F. Giorgis, C.F. Pirri, Solid State Commun. 96 (1995) 17.
3. I. Solomon, M.P. Schmidt, H. Tran-Quoc, Phys. Rev. B 38 (1988) 9895.
4. J. Bullot, M.P. Schmidt, Phys. Status Solidi B 143 (1987) 345.
5. F. Demichelis, F. Giorgis, C.F. Pirri, E. Tresso, Philos. Mag. A 72 (1995) 913.
6. F. Giorgis, C.F. Pirri, E. Tresso, P. Rava, Philos. Mag. B 75 (1997) 471.
7. V. Chu, J.P. Conde, J. Jarego, P. Brogueira, J. Rodriguez, N. Barradas, J.C. Soares, J. Appl. Phys. 78 (1995) 3164.
8. V. Chu, J.P. Conde, Amorphous Silicon Technology 1996, Vol. 420, Materials Research Society Symp. Proc., Pittsburgh, PA, 1996, p. 381.
9. J. Robertson, Philos. Mag. B 66 (1992) 615.
10. Y. Catherine, A. Zamouche, J. Bullot, M. Gauthier, Thin Solid Films 109 (1983) 145.
11. R.G. Andosca, W.J. Varhue, E. Adams, J. Appl. Phys. 72 (1992) 1126.
12. F. Demichelis, F. Giorgis, C.F. Pirri, E. Tresso, G. Amato, U. Coscia, Physica B 205 (1995) 169.
13. W. Siebert, R. Carius, W. Fuhs, K. Jahn, Philos. Mag. B 140 (1987) 311.
14. L.R. Tessler, I. Solomon, Amorphous Silicon Technology, Vol. 336, Mater. Res. Soc. Symp. Proc., Pittsburg, PA, 1994, p. 613.
15. L.R. Tessler, I. Solomon, Phys. Rev. B 52 (1995) 10962.
16. R.S. Sussmann, R. Ogden, Philos. Mag. B 44 (1981) 137.
17. F. Giorgis, F. Giuliani, C.F. Pirri, A. Tagliaferro, E. Tresso, J. of Non-Cryst. Solids, 227-230 (1998) 564.