Monte Carlo study of interfacial silicon suboxide layers and oxidation kinetics

Applied Surface Science

Volumn 190, Issue 1-4, 2002, Pages 30-34

  Da Silva Jr , Eron F ^a   De Vasconcelos, E A ^a   Stosic B D ^a  

^a FEDERAL UNIVERSITY OF PERNAMBUCO   (Brazil)

Author keywords

Growth kinetics; Modeling; Monte Carlo; Oxide; Si SiO 2 interface

Indexed keywords

COMPUTER SIMULATION; FILM GROWTH; MONTE CARLO METHODS; OXIDATION; REACTION KINETICS; SILICA; THIN FILMS;

INTERFACE DYNAMICS;

INTERFACES (MATERIALS);

EID: 0037042052     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00878-9     Document Type: Conference Paper

References (8)