Electron plasma parameters and ion energy measurement at the grounded electrode in an rf discharge

Journal of Physics D: Applied Physics

Volumn 35, Issue 21, 2002, Pages 2808-2814

  Rusu, I A ^a   Popa, G ^a   Sullivan, J L ^b  

^a ALEXANDRU IOAN CUZA UNIVERSITY OF IASI   (Romania)

^b ASTON UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC FIELD EFFECTS; ELECTRON TRANSPORT PROPERTIES; ELECTRONS; GROUNDING ELECTRODES; MASS SPECTROMETRY; PLASMA SHEATHS; SURFACE DISCHARGES;

ELECTRON PLASMA; ION ENERGY DISTRIBUTION; LANGMUIR PROBE; RADIOFREQUENCY DISCHARGE; SHEATH POTENTIAL;

ARGON;

EID: 0037038659     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/35/21/317     Document Type: Article

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