Model of capacitively coupled radio-frequency methane/hydrogen plasmas for III-V semiconductor etching applications

Journal of Physics D: Applied Physics

Volumn 32, Issue 15, 1999, Pages 1857-1869

  Layberry, R L ^a   Wronski, Z ^b   Pearce, C G ^a   Sullivan, J L ^a  

^a ASTON UNIVERSITY   (United Kingdom)

^b MARIA CURIE SK ODOWSKA UNIVERSITY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC EXCITATION; ELECTRON ENERGY LEVELS; ELECTRONS; FLUXES; HYDROGEN; IONIZATION; IONS; MATHEMATICAL MODELS; METHANE; MOLECULAR VIBRATIONS; REACTIVE ION ETCHING; SURFACES;

ELECTRON ENERGY DISTRIBUTION FUNCTIONS; ION FLUXES; IONIZATION DISTRIBUTION FUNCTION; SECONDARY ELECTRON EMISSION COEFFICIENT; SPATIAL IONIZATION DISTRIBUTION;

PLASMAS;

EID: 0032641223     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/32/15/314     Document Type: Article

References (49)

1. Lister G G 1992 J. Phys. D: Appl. Phys. 25 1649-80
2. Barnes M S, Colter T J and Elta M E 1987 J. Appl. Phys. 61 81-9
3. Beouf J P 1987 Phys. Rev. A 36 2782-92
4. Belengeur P and Beouf J P 1990 Phys. Rev. 41 4447-59
5. Richards A D, Thompson B E and Sawin H H 1987 Appl. Phys. Lett. 50 492-4
6. Graves D B 1987 J. Appl. Phys. 62 88-94
7. Oh Y H, Choi N H and Choi D I 1990 J. Appl. Phys. 67 3264-8
8. Okazaki K, Makabe T and Yamaguchi Y 1989 Appl. Phys. Lett. 54 1742-4
9. Makabe T, Tochikubo F and Nishimura N 1990 Phys. Rev. A 42 3674-7
10. Makabe T, Nakano N and Yamaguchi Y 1992 Phys. Rev. A 45 2520-31
11. Goedheer W J and Meijer P M 1991 IEEE Trans. Plasma Sci. 19 245-9
12. Nitschke T E and Graves D B 1994 J. Appl. Phys. 76 5646-60
13. Trombley H W, Terry F and Elta M 1991 IEEE Trans. Plasma Sci. 19 158-62
14. Date A, Kitamori K, Sakai Y and Tagashira H 1992 J. Phys. D: Appl. Phys. 25 442-52
15. Kushner M J 1985 J. Appl. Phys. 58 4024-31
16. Song Y P, Field D and Klemperer D F 1989 J. Phys. D: Appl. Phys. 23 673-81
17. Thompson B E, Allen K D, Richards A D and Sawin H H 1986 J. Appl. Phys. 59 1891-903
18. Maneschijn A and Goedheer W J 1991 J. Appl. Phys. 69 2923-30
19. Thompson B E and Sawin H H 1988 J. Appl. Phys. 63 2241-51
20. Maneschijn A and Goedheer W J 1990 J. Appl. Phys. 69 2923-30
21. May P W, Field D and Klemperer D F 1992 J. Appl. Phys. 71 3721-30
22. Liu J, Huppert G L and Sawin H H 1990 J. Appl. Phys. 68 3916-34
23. May P W, Field D and Klemperer D F 1992 J. Appl. Phys. 71 3721-30
24. Kuypers A D 1989 PhD Thesis Utrecht University
25. Maneschijn A and Goedheer W J 1990 J. Appl. Phys. 69 2923-30
26. Dickenson A C 1994 Measurement and simulation of ion energy distributions in a reactive ion etcher PhD Thesis Bristol University
27. Phelps A V 1991 J. Phys. Chem. Ref. Data 19 653-75
28. Field D, Klemperer D F, May P W and Song Y P 1991 J. Appl. Phys. 70 82-92
29. Surendra M and Graves D B 1991 IEEE Trans. Plasma Sci. 19 144-57
30. de Vries C A M and van den Hoek WGM 1985 J. Appl. Phys. 58 2074-6
31. Layberry R L, Pearce C G and Sullivan J L 1997 J. Phys. D: Appl. Phys. 30 3187-96
32. Field D, Klemperer D F, May P W and Song Y P 1991 J. Appl. Phys. 70 82-92
33. Csanak G, Cartwright D C, Srivastava S K and Trajmar S 1984 Electron-Molecule Interactions and their Applications (New York: Plenum)
34. Trajmar S and Cartwright D C1985 Excitation of molecules by electron impact in Christophou [2]. Updated by S Trajmar ICPEAC XIV (Stanford) p 77
35. Winstead C, Sun Q and McKoy V 1992 J. Chem. Phys. 98 2132-7
36. Vuskovic L and Trajmar S 1983 J. Chem. Phys. 78 4947-51
37. Shyn T W 1991 J. Phys. B: At. Mol. Opt. Phys. 24 5169-73
38. Tanaka H, Kubo M, Onodera N and Suzuki A 1983 J. Phys. B: At. Mol. Phys. 16 2861-9
39. Mapstone B and Newell W R 1994 J. Phys. B: At. Mol. Opt. Phys. 27 5761-72
40. Adamczyk B, Boerboom A H, Shram B L and Kistermaker J 1966 J. Chem. Phys. 44 4640
41. Ordonez C A and Peterkin R E 1995 J. Appl. Phys. 79 2270-4
42. Böhm C and Perrin J 1992 Rev. Sci. Instrum. 64 31-44
43. Radçig A A and Smirnow B M 1980 Sprawocznik po atomnoj i molekularnoj fizikie (Moscow: Atomizdat) pp 150-4
44. HYPERCHEM 1994 Hypercube Inc., 1115 N.W. 4th Street, Gainesville, Florida 32601, USA
45. Glosik J 1993 Int. J. Mass. Spec. Ion. Pross. 139 15-23
46. Clow R P and Futrell J H 1970 Int. J. Mass. Spec. Ion. Phys. 4 165
47. McIver R T and Dunbar R 1971 Int. J. Mass. Spec. Ion. Phys. 7 471
48. Giardini-Guidoni A and Friedman L 1966 J. Chem. Phys. 45 937
49. Xu W and Sides P J 1995 J. Appl. Phys. 77 4293-301