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Volumn 35, Issue 11, 2002, Pages 1205-1209
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Preparation and characterization of n-type microcrystalline hydrogenated silicon oxide films
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVATION ENERGY;
AMORPHOUS SILICON;
CRYSTAL MICROSTRUCTURE;
ELECTRIC CONDUCTIVITY;
ENERGY GAP;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
HYDROGENATION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
RAMAN SPECTROSCOPY;
SILICA;
SILICON SOLAR CELLS;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION ANALYSIS;
OPTICAL GAPS;
THIN FILMS;
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EID: 0037036014
PISSN: 00223727
EISSN: None
Source Type: Journal
DOI: 10.1088/0022-3727/35/11/317 Document Type: Article |
Times cited : (29)
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References (10)
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