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Volumn , Issue , 1996, Pages 1121-1124
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Development of p-type microcrystalline silicon-carbon alloy thin film at low power and its application in tunnel junctions
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Author keywords
[No Author keywords available]
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Indexed keywords
CARBON;
CHEMICAL VAPOR DEPOSITION;
CONDUCTIVE FILMS;
CRYSTALLINE MATERIALS;
ELECTRON TUNNELING;
FILM PREPARATION;
PHOTOCONDUCTIVITY;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON ALLOYS;
SILICON CARBIDE;
THIN FILMS;
TUNNEL JUNCTIONS;
DARK CONDUCTIVITY;
MICROCRYSTALLINE SILICON CARBIDE;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SILICON SOLAR CELLS;
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EID: 0030408399
PISSN: 01608371
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (7)
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References (7)
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