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Volumn 90, Issue 1-2, 2002, Pages 90-98

Studies on structural and electrical properties of silicon nitride films deposited by unbalanced magnetron sputter deposition

(2) Patra, S K a Rao, G Mohan a

a INDIAN INSTITUTE OF SCIENCE (India)

Author keywords

Ion assisted growth; Silicon nitride films; Unbalanced magnetron sputtering

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CONDUCTIVITY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BOMBARDMENT; MAGNETRON SPUTTERING; MIM DEVICES; MISFET DEVICES; PERMITTIVITY MEASUREMENT; SILICON NITRIDE; SPUTTER DEPOSITION;

DIELECTRIC STRENGTH;

THIN FILMS;

EID: 0037034715 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(01)00916-3 Document Type: Article

Times cited : (12)

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