Kinetic of phase transformation of SrBi2Ta2O9 deposited by metalorganic decomposition on platinum electrodes

Applied Physics Letters

Volumn 81, Issue 23, 2002, Pages 4410-4412

  Moert, Manfred ^a   Mikolajick, T ^a   Schindler, G ^a   Nagel, N ^a   Hartner, W ^a   Dehm, C ^a   Kohlstedt, H ^b   Waser, R ^b  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ATOMIC FORCE MICROSCOPY; ISOTHERMS; NUCLEATION; PHASE TRANSITIONS; PLATINUM; STRONTIUM COMPOUNDS;

METALORGANIC DECOMPOSITION;

THIN FILMS;

EID: 0037011549     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1526926     Document Type: Article

References (13)

1. T. Mikolajick, C. Dehm, W. Hartner, I. Kasko, M. Kastner, N. Nagel, M. Moert, and C. Mazuré, Microelectron. Reliab. 41, 947 (2001).
2. C. Dehm, W. Hartner, G. Schindler, R. Bergmann, B. Hasler, I. Kasko, M.J. Kastner, M. Schiele, V. Weinrich, and C. Mazuré, Integr. Ferroelectr. 26, 197 (1999).
3. C.A. Paz de Araujo, J.D. Cuchiaro, L.D. McMillian, M.C. Scott, and J.F. Scott, Nature (London) 374, 627 (1995).
4. K. Amanuma, T. Hase, and Y. Miyasaka, Appl. Phys. Lett. 66, 221 (1995).
5. O. Auciello, Integr. Ferroelectr. 15, 211 (1997).
6. T.J. Boyle, C.D. Buchheit, M.A. Rodriguez, H.N. Al-Shareef, B.A. Hernandez, B. Scott, and J.W. Ziller, J. Mater. Res. 11, 2274 (1996).
7. T. Osaka, A. Sakakibara, T. Seki, S. Ono, I. Koiwa, and A. Hashimoto, Jpn. J. Appl. Phys., Part 1 37, 597 (1998).
8. M. Moert, G. Schindler, W. Hartner, I. Kasko, M.J. Kastner, T. Mikolajick, C. Dehm, and R. Waser, Integr. Ferroelectr. 30, 235 (2000).
9. R. Waser, T. Schneller, S. Hoffmann-Eifert, and P. Ehrhart, Integr. Ferroelectr. 36, 3 (2001).
10. M. Avrami, J. Chem. Phys. 7, 1103 (1939).
11. W.A. Johnson and R.F. Mehl, Trans. Am. Inst. Min., Metall. Pet. Eng. 135, 416 (1939).
12. E.S. Machlin, An Introduction to Aspects of Thermodynamics Relevant to Materials Science, 1st ed. (Giro, New York, 1991), p. 192.
13. Y.-M. Sung, J. Mater. Res. 16, 2039 (2001).