Selectivity enhancement of indium-doped SnO2 gas sensors

Thin Solid Films

Volumn 416, Issue 1-2, 2002, Pages 260-263

  Salehi, A ^a  

^a K N TOOSI UNIVERSITY OF TECHNOLOGY   (Iran)

Author keywords

CVD; Evaporated; Gas sensors; Selective gases; SnO2; Spray pyrolysis; Sputtering

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); EVAPORATION; INDIUM; POROSITY; PYROLYSIS; SPUTTERING; THERMAL EFFECTS; TIN COMPOUNDS;

SPRAY PYROLYSIS;

CHEMICAL SENSORS;

EID: 0037009754     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00626-0     Document Type: Article

References (8)

1. Nomura K., Shiozawa H., Takada T., Reuter H., Richter E. J. Mater. Sci. 8:1997;301.
2. L.I. Popova, S.K. Andreev, V.K. Gurorguev, E.B. Manolov, Proceedings of the 20th international IEEE Conference on Microelectronics 2 (1995) 581.
3. K.L. Wong, Z. Tang, K.O. Sin, P.C. Chan, P.W. Cheung, Proceedings of the 20th international IEEE Conference on Microelectronics 2 (1995) 179.
4. Sundaram K.B., Bhagara G.K. J. Phys. D: Appl. Phys. 14:1981;333.
5. Gordillo G., Moreno L.C., Dela Cruz W., Teheran P. Thin Solid Films. 252:1994;61.
6. Salehi A. Thin Solid Films. 324:1998;214.
7. Cobianu C., Saraniu C., Ciciliano P., Caponoe S., Utrianien M., Ninisto L. Sensors Actuators B. 77:2001;496.
8. Ansari S.G., Gosavi S.W., Gangal S.A., Karekar R.N., Aiyer R.C. J. Mater. Sci. 8:1997;23.