Preparation of SnO2 films with high sensitivity and selectivity to C2H5OH by oxygen radical assisted electron beam evaporation for micro-machined gas sensors

Thin Solid Films

Volumn 416, Issue 1-2, 2002, Pages 248-253

  Mo, Yaowu ^a,b   Okawa, Yuzo ^b   Nakai, Takehito ^c   Tajima, Motoshi ^d   Natukawa, Kazuki ^b  

^a SHANGHAI UNIVERSITY   (China)

^b OSAKA MUNICIPAL TECHNICAL RESEARCH INSTITUTE   (Japan)

^c Hochiki Corporation   (Japan)

^d KUBOTA CORPORATION   (Japan)

Author keywords

Electrical properties and measurements; Evaporation; Sensors; Tin oxide

Indexed keywords

ANNEALING; ELECTRIC PROPERTIES; ELECTRIC VARIABLES MEASUREMENT; ELECTRON BEAMS; EVAPORATION; MICROMACHINING; TIN COMPOUNDS;

ELECTRON BEAM EVAPORATION;

CHEMICAL SENSORS;

EID: 0037009691     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00608-9     Document Type: Article

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