Study and characterization of the structures Au/Al2O3/Si and Au/Al0/Al2O3/Si

Vacuum

Volumn 67, Issue 1, 2002, Pages 125-129

  Gruzza, B ^a   Akkal, B ^a   Bideux, L ^a   Benamara, Z ^b   Robert, C ^a  

^a UNIVERSITÉ CLERMONT AUVERGNE   (France)

^b UNIVERSITY OF SIDI BEL ABBES   (Algeria)

Author keywords

Electrical measurements; Electron spectroscopic methods; Metal insulator semiconductor structures

Indexed keywords

ALUMINA; AUGER ELECTRON SPECTROSCOPY; ELECTRIC INSULATORS; ELECTRIC POTENTIAL; GOLD; INTERFACES (MATERIALS); SEMICONDUCTING SILICON; SUBSTRATES;

SEMICONDUCTOR INTERFACES;

SEMICONDUCTOR DEVICE STRUCTURES;

EID: 0037009248     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00197-5     Document Type: Conference Paper

References (17)

1. Devices and integrated circuit semiconductors