Phase formation in ion beam bombarded Al-Au multilayers using high-current 2.0 MeV 4He+ ions

Surface and Interface Analysis

Volumn 26, Issue 9, 1998, Pages 650-658

  Markwitz, A ^a,b   Matz, W ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b GNS SCIENCE   (New Zealand)

Author keywords

Al Au; Ion beam bombardment; Multilayers; Phase formation; RBS; XRD

Indexed keywords

ALUMINUM ALLOYS; CARBON; EVAPORATION; GOLD; INTERDIFFUSION (SOLIDS); INTERMETALLICS; ION BOMBARDMENT; PHASE COMPOSITION; PHASE TRANSITIONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; X RAY DIFFRACTION;

INTERMIXING;

METALLIC SUPERLATTICES;

EID: 0032137948     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199808)26:9<650::AID-SIA409>3.0.CO;2-5     Document Type: Article

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