Thermal and plasma nitridation of GaSe crystal

Vacuum

Volumn 67, Issue 1, 2002, Pages 69-73

  Balitskii, O A ^a   Savchyn, V P ^a   Stakhira, P J ^b   Berchenko, N N ^b,c  

^a IVAN FRANKO NATIONAL UNIVERSITY OF LVIV   (Ukraine)

^b LVIV POLYTECHNIC NATIONAL UNIVERSITY   (Ukraine)

^c UNIVERSITY OF RZESZÓW   (Poland)

Author keywords

GaN; GaSe; Low temperature plasma; Nitridation; Phase equilibria

Indexed keywords

LUMINESCENCE; PHASE EQUILIBRIA; TEXTURES; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

PLASMA NITRIDATION;

GALLIUM COMPOUNDS;

EID: 0037009149     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00188-4     Document Type: Conference Paper

References (17)