Development of microelectromechanical system fabrication emulator by solid modeling technology

Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao

Volumn 23, Issue 6, 2002, Pages 525-532

  Chen, Kuo Shen ^a   Cheng, Ching Jen ^a   Yeh, Hsiu Ming ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Computer aided design; MEMS; Microfabrication; Solid modeling

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; COSTS; PRODUCT DEVELOPMENT; VIRTUAL REALITY;

AUTOMATIC SOLID MODELING FLOW; EMULATOR; VIRTUAL MICROFABRICATION;

MICROELECTRONIC PROCESSING;

EID: 0037005042     PISSN: 02579731     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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