High repetition-rate, low jitter pulsed power generator for excimer laser applications

IEEE Conference Record of Power Modulator Symposium

Volumn , Issue , 2002, Pages 605-607

  Jiang, Weihua ^a   Matsuda, Takuya ^a   Yatsui, Kiyoshi ^a   Tokuchi, Akira ^b  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

^b Nichicon Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITOR STORAGE; ELECTRIC NETWORK SYNTHESIS; ELECTRIC POWER SUPPLIES TO APPARATUS; EXCIMER LASERS; INSULATED GATE BIPOLAR TRANSISTORS; JITTER; MAGNETIC PROPERTIES; SEMICONDUCTOR SWITCHES;

MAGNETIC PULSE COMPRESSION; MAGNETIC SWITCHES; PULSED POWER GENERATOR;

PULSE GENERATORS;

EID: 0037004256     PISSN: 10768467     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. M. Rothschild, T. M. Bloomstein, J. E. Curtin, D. K. Downs, T. H. Fedynyshyn, D. E. Hardy, R. R. Kunz, V. Liberman, J. H. C. Sedlacek, R. S. Uttaro, A. K. Bates, and C. Van Peski, "157 nm: Deepest deep-ultraviolet yet", Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 17, no. 6, pp. 3262-3266, 1999.
2. David Johns, Richard Ness, and Brett Smith, "Timing Compensation for an Excimer Laser Solid-State Pulsed Power Module (SSPPM)", IEEE Trans. on Plasma Science, vol. 28, no. 5, 1329-1332, 2000.