Timing compensation for an excimer laser solid-state pulsed power module (SSPPM)

IEEE Transactions on Plasma Science

Volumn 28, Issue 5, 2000, Pages 1329-1332

  Johns, David ^a,b   Ness, Richard ^a,b   Smith, Brett ^a  

^a IEEE

^b CYMER INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ELECTRIC POTENTIAL; LASER PULSES; MODULATORS; PIECEWISE LINEAR TECHNIQUES; SOLID STATE LASERS; TEMPERATURE; TIMING CIRCUITS;

MAGNETIC MODULATOR; MAGNETIC SWITCH TEMPERATURE; SOLID STATE PULSED POWER MODULE; TIMING COMPENSATION CIRCUIT;

EXCIMER LASERS;

EID: 0034289908     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.901192     Document Type: Article

References (2)