A new method for high resolution position measurement on long range

Journal Europeen des Systemes Automatises

Volumn 36, Issue 9, 2002, Pages 1295-1307

  Prelle, Christine ^a   Lamarque, Frédéric ^a   Mazeran, Pierre Emmanuel ^a  

^a UNIVERSITÉ DE TECHNOLOGIE DE COMPIÈGNE   (France)

Author keywords

Fiber optic; Grating; Millimetric range; Nanometric resolution; Position sensor

Indexed keywords

DIFFRACTION GRATINGS; FIBER OPTIC SENSORS; MICROACTUATORS; MINIATURE INSTRUMENTS; NANOTECHNOLOGY; POSITION MEASUREMENT; PRECISION ENGINEERING;

MICROMACHINES; MINIATURE SENSOR; NANOMETRIC DISPLACEMENTS;

MICROSENSORS;

EID: 0036996725     PISSN: 12696935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

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