Lamb wave devices based on capacitive micromachined ultrasonic transducers

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2002, Pages 1031-1034

  Badi, Mohammed H ^a   Yaralioglu, Goksen G ^a   Ergun, A Sanli ^a   Hansen, Sean T ^a   Khuri Yakub, B T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; ALUMINUM; CRYSTALLINE MATERIALS; ELECTRODES; EQUIVALENT CIRCUITS; INSERTION LOSSES; INTEGRATED CIRCUITS; SEMICONDUCTING SILICON; SUBSTRATES; VIBRATIONS (MECHANICAL);

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; CRYSTALLINE SILICON; LAMB WAVE DEVICE;

ULTRASONIC TRANSDUCERS;

EID: 0036990273     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)

1. H. Lamb, Proc. Roy. Soc. (London), Ser. A, Vol 93, p. 114, 1917.
2. I.A. Viktorov, Rayleigh and Lamb Waves, Plenum: New York, NY 1967.
3. B.A. Auld, Acoustic Fields and Waves in Solids, 2d Ed., Krieger: Malabar, FL, 1990.
4. R.M. White, "Surface Elastic Waves," Proc. IEEE, Vol. 58, No. 8, pp. 1238-76, 1970.
5. S.W. Wenzel, Applications of Ultrasonic Lamb Waves, Doctoral Dissertation, EECS Department, University of California, Berkeley, CA, 1982.
6. S.W. Wenzel and R.M. White, "A Multisensor Employing and Ultrasonic Lamb Wave Oscillator", IEEE Trans. Electron Devices, Vol. 35, pp. 735, 1988.
7. M. H. Badi, G. G. Yaralioglu, A. S. Ergun, F. L. Degertekin, C. H. Cheng, B. T. Khuri-Yakub, "A First Experimental Verification of Micromachined Capacitive Lamb Wave Transducers," in Proc. IEEE Ultrasonics Symposium, Vol. 1, pp. 311-314, 2000.
8. G.G. Yaralioglu, M.H. Badi, A.S. Ergun, C.H. Cheng, F.L. Degertekin, B.T. Khuri-Yakub, "Lamb Wave Devices Using Capacitive Micromachined Ultrasonic Transducers," Applied Physics Letters, Vol. 78, pp. 111-113, 2001.
9. G.G. Yaralioglu, F.L. Degertekin, M.H. Badi, B.A. Auld, and B.T. Khuri-Yakub, "Finite Element Method and Normal Mode Modeling of Capacitive Micromachined SAW and Lamb Wave Transducers," 2000 Ultrasonics Symposium Proceedings, pp. 129-132, 2000.
10. M.H. Badi, G.G. Yaralioglu, A.S. Ergun, S.T. Hansen, E.J. Wong, and B.T. Khuri-Yakub, "Capacitive Micromachined Ultrasonic Lamb Wave Transducers," submitted to IEEE Trans. Ultrason. Ferroelect. Freq. Contr., 2002.
11. R.M. White, P.J. Wicher, S.W. Wenzel, and E.T. Zellers, "Plate-mode Ultrasonic Sensors," IEEE Trans. Ultrasonics, Ferroelectrics, Frequency Control, Vol. 34, No. 2, pp. 162-171, 1987.
12. W.P. Mason, Electromechanical Transducers and Wave Filters, New York: D. Van Norstrand Co., Inc., 1942.
13. L.L. Beranek, Acoustics, Woodbury: Acoustical Society of America, 1996.
14. A. Caronti, G. Caliano, A. Iula, and M. Pappalardo, "An Accurate Model For Capacitive Micromachined Ultrasonic Transducers," IEEE Trans. Ultrasonics, Ferroelectrics, Frequency Control, Vol. 49, No. 2, pp. 159-168, 2002.
15. X. Jin, "Micromachined Capacitive Ultrasonic Immersion Transducer Array," Doctoral Dissertation, Electrical Engineering Department, Stanford University, Standford, CA, 2000.
16. F.V. Hunt, Electroacoustics, Acoustical Socity of America, 1982.
17. P.R. Stepanishen, "The Radiation Impedance of a Rectangular Piston," J. Sound and Vibration, Vol. 55, pp. 275-288, 1977.
18. J.W. (Lord Rayleigh) Strutt, The Theory of Sound Vol. 1, New York: Macmillan, 1877-78.
19. V. Foglietti, D. Memmi, G. Caliano, E. Cianci, F. Galanello, M. Pappalardo, "Fabrication of Micromechanical Capacitive Ultrasonic Transducers By Surface Micromachining," in Proceedings of the International Conference on Microtechnologies, Vol. 1, pp. 79-82, 2000.
20. H. Seidel, L. Csepregi, A. Heuberger, H. Baumg'artel, "Anisotropic Etching of Crystalline Silicon in Alkaline Solutions," J. Electrochem. Soc, Vol. 13, No. 11, pp. 3612-25, 1990.
21. C-H. Han, E.S. Kim, "Fabrication of Dome-Shaped Diaphragm With Circular Clamped Boundary On Silicon Substrate," 12th Intl. Workshop on Micro Electro Mechanical Systems, pp. 505-510, 1999.
22. G.C. Hilton, J.M. Martinis, K.D. Irwin, N.F. Bergren, D.A. Wollman, M.E. Huber, S. Deiker, S.W. Nam, "Microfabricated Transisiton-Edge X-Ray Detectors," IEEE Transactions on Applied Superconductivity, Vol. 11, No. 1, Pt. 1, pp. 739-742, 2001.