SCOPUS 정보 검색 플랫폼

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4779, Issue , 2002, Pages 52-59

Large AFM scans with a nanometer coordinate measuring machine (NCMM)

(3) Petersen, Ralph a Rothe, Hendrik a Hüser, Dorothee a

a HELMUT SCHMIDT UNIVERSITY (Germany)

Author keywords

Large AFM scans; Nanometer coordinate measuring machine (NCMM); Nanotechnology

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; COORDINATE MEASURING MACHINES; CRYSTAL MICROSTRUCTURE; NANOTECHNOLOGY; SCANNING; SEMICONDUCTING SILICON; STANDARDS; SURFACE TOPOGRAPHY;

NANOMETER COORDINATE MEASURING MACHINE; SCANNING MOTION; SILICON MICROSTRUCTURES;

INTEGRATED CIRCUIT TESTING;

EID: 0036980868 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.451749 Document Type: Conference Paper

Times cited : (4)

References (6)

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- in Metrology, Inspection, and Process Control for Microlithography XIII, B. Singh, ed.
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- (1999) Proc. SPIE , vol.3677 , pp. 1017-1028
- Kramar, J.¹ Amatucci, E.² Gilsinn, D.³ Jun, J.-S.⁴ Penzes, W.⁵ Scire, F.⁶ Teague, E.C.⁷ Villarrubia, J.⁸

2
- 0033679903
- Development problems of a nanometer coordinate measuring machine (NCMM)
- in Scattering and Surface Roughness III, Z.-H. Gu and A. Maradudin, eds.
- R. Petersen and H. Rothe, "Development problems of a Nanometer Coordinate Measuring Machine (NCMM)," in Scattering and Surface Roughness III, Z.-H. Gu and A. Maradudin, eds., Proc. SPIE(4100-30), pp. 167-172, 2000.
- (2000) Proc. SPIE , vol.4100 , Issue.30 , pp. 167-172
- Petersen, R.¹ Rothe, H.²

3
- 0013111267
- Large area AFM-scans with the nanometer coordinate measuring machine
- K. Hasche, W. Mirandé, and G. Wilkening, eds., PTB-Bericht (PTB-F-44)
- R. Petersen, H. Rothe, and D. Hüser, "Large area AFM-scans with the Nanometer Coordinate Measuring Machine," in Proceedings of the 5th Seminar on Quantitative Microscopy and 1st Seminar on Nanoscale Calibration Standards and Methods. NanoScale 2001. Dimensional measurements in the micro- and nanometre range, K. Hasche, W. Mirandé, and G. Wilkening, eds., PTB-Bericht (PTB-F-44), pp. 145-151, 2001.
- Proceedings of the 5th Seminar on Quantitative Microscopy and 1st Seminar on Nanoscale Calibration Standards and Methods. NanoScale 2001. Dimensional Measurements in the Micro-and Nanometre Range , vol.2001 , pp. 145-151
- Petersen, R.¹ Rothe, H.² Hüser, D.³

4
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- G. Wilkening, ed.; (Braunschweig, Germany), PTB
- G. Wilkening, ed., Final Report: SPMet - European Network on the Calibration of SPMs, (Braunschweig, Germany), PTB, 2000.
- (2000) Final Report: SPMet - European Network on the Calibration of SPMs

5
- 0003867051
- Ullstein TB-Verlag, Berlin
- R. Kurzweil, Homo sapiens. Leben im 21. Jahrhundert. Was bleibt vom Menschen?, Ullstein TB-Verlag, Berlin, 1999.
- (1999) Homo Sapiens. Leben im 21. Jahrhundert. Was Bleibt vom Menschen?
- Kurzweil, R.¹

6
- 0013062195
- MathWorks; Technical Note 1106
- MathWorks, http://www.mathworks.com/support/tech-notes/1100/1106.shtml, Memory Management Guide. Technical Note 1106.
- Memory Management Guide

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.