Development problems of a nanometer coordinate measuring machine (NCMM)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4100, Issue , 2000, Pages 167-172

  Petersen, Ralph ^a   Rothe, Hendrik ^a  

^a HELMUT SCHMIDT UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALGORITHMS; ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; MATHEMATICAL MODELS; NANOTECHNOLOGY; OPTIMIZATION; POSITION CONTROL;

MICROSYSTEMS; NANOMETER COORDINATE MEASURING MACHINE; SCANNING PROBE MICROSCOPY;

SURFACE MEASUREMENT;

EID: 0033679903     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)