A new inchworm mechanism with hydraulic booster

Proceedings of the ASME Design Engineering Technical Conference

Volumn 5 B, Issue , 2002, Pages 1369-1374

  Behjat, Sara ^a   Khajepour, Amir ^a   Morris, Kirsten A ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC EXCITERS; HYDRAULIC EQUIPMENT; NANOTECHNOLOGY; PRODUCTIVITY; LINEAR MOTORS; MANUFACTURE; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICES; HYDRAULICS;

HYDRAULIC BOOSTERS; BIOLOGICAL CELLS; HYDRAULIC BOOSTER; INCHWORM MECHANISM; MANUFACTURING COST; MEASUREMENT INSTRUMENTS; NANOMETER PRECISION; POSITIONING DEVICES; SEMICONDUCTOR MANUFACTURING; HIGH-SPEED; MASS PRODUCTION; NANO-POSITIONING; NEW HIGH;

LINEAR MOTORS; MICROMACHINING; TECHNICAL PRESENTATIONS;

EID: 0036979977     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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