New amplified piezoelectric actuator for precision positioning and active damping

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3041, Issue , 1997, Pages 496-504

  LeLetty, R ^a   Claeyssen, F ^a   Lhermet, N ^a   Bouchilloux, Philippe ^a  

^a Fr

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; ELECTROMECHANICAL DEVICES; FINITE ELEMENT METHOD; INTELLIGENT STRUCTURES; MULTILAYERS; OPTICAL DEVICES; PIEZOELECTRIC DEVICES; POSITION CONTROL; PRECISION ENGINEERING; STIFFNESS;

ACTIVE DAMPING; LASER DOPPLER INTERFEROMETERS;

ACTUATORS;

EID: 0031383546     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)