A roadmap towards cost efficient 300 mm equipment

Materials Science in Semiconductor Processing

Volumn 5, Issue 4-5 SPEC., 2002, Pages 321-331

  Pfitzner, Lothar ^a   Kücher, Peter ^b  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

^b INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

300 mm technology; Advanced process control; Processing costs

Indexed keywords

COST EFFECTIVENESS; PLASMA DEVICES; PROCESS CONTROL; SENSORS;

PROCESSING COSTS;

MICROELECTRONICS;

EID: 0036966742     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(03)00010-6     Document Type: Conference Paper

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